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six degrees of freedom inertial sensor adis16367 rev. a information furnished by analog devices is believed to be accurate and reliable. however, no responsibility is assumed by analog devices for its use, nor for any infringements of patents or other rights of third parties that may result from its use. specifications subject to change without notice. no license is granted by implication or otherwise under any patent or patent rights of analog devices. trademarks and registered trademarks are the property of their respective owners. one technology way, p.o. box 9106, norwood, ma 02062-9106, u.s.a. tel: 781.329.4700 www.analog.com fax: 781.461.3113 ?2010C2011 analog devices, inc. all rights reserved. features tri-axis digital gyroscope with digital range scaling 300/sec, 600/sec, 1200/sec settings tight orthogonal alignment: 0.05 tri-axis digital accelerometer: 18 g autonomous operation and data collection no external configuration commands required start-up time: 180 ms sleep mode recovery time: 4 ms factory-calibrated sensitivity, bias, and axial alignment calibration temperature range: ?40c to +85c spi-compatible serial interface wide bandwidth: 330 hz embedded temperature sensor programmable operation and control automatic and manual bias correction controls bartlett window, fir filter length, number of taps digital i/o: data ready, alarm indicator, general-purpose alarms for condition monitoring sleep mode for power management dac output voltage enable external sample cl ock input: up to 1.2 khz single-command self-test single-supply operation: 4.75 v to 5.25 v 2000 g shock survivability operating temperature range: ?40c to +105c applications medical instrumentation robotics platform controls navigation general description the adis16367 i sensor? is a complete inertial system that includes a tri-axis gyroscope and tri-axis accelerometer. each sensor in the adis16367 combines industry-leading i mems? technology with signal conditioning that optimizes dynamic performance. the factory calibration characterizes each sensor for sensitivity, bias, alignment, and linear acceleration (gyro bias). as a result, each sensor has its own dynamic compensation formulas that provide accurate sensor measurements over a temperature range of ?40c to +85c. the adis16367 provides a simple, cost-effective method for integrating accurate, multiaxis inertial sensing into industrial systems, especially when compared with the complexity and investment associated with discrete designs. all necessary motion testing and calibration are part of the production process at the factory, greatly reducing system integration time. tight orthogonal alignment simplifies inertial frame alignment in navigation systems. an improved spi interface and register structure provide faster data collection and configuration control. the adis16367 uses a compatible pinout and the same package as the adis1635x family. therefore, systems that currently use the adis1635x family can upgrade their performance with minor firmware adjustments in their processor designs. this compact module is approximately 23 mm 23 mm 23 mm and provides a flexible connector interface that enables multiple mounting orientation options. functional block diagram mems angular rate sensor signal conditioning and conversion calibration and digital processing digital control power management output registers and spi interface a ux_ adc a ux_ dac rst cs sclk din dout tri-axis mems acceleration sensor vcc gnd dio4/ clkin self-test adis16367 temperature sensor alarms dio3 dio2 dio1 08398-001 figure 1.
adis16367 rev. a | page 2 of 20 table of contents features .............................................................................................. 1 ? applications....................................................................................... 1 ? general description ......................................................................... 1 ? functional block diagram .............................................................. 1 ? revision history ............................................................................... 2 ? specifications..................................................................................... 3 ? timing specifications .................................................................. 5 ? timing diagrams.......................................................................... 5 ? absolute maximum ratings............................................................ 6 ? esd caution.................................................................................. 6 ? pin configuration and function descriptions............................. 7 ? typical performance characteristics ............................................. 8 ? theory of operation ........................................................................ 9 ? basic operation ............................................................................ 9 ? reading sensor data.................................................................... 9 ? device configuration .................................................................. 9 ? memory map .............................................................................. 10 ? burst read data collection ...................................................... 11 ? output data registers ............................................................... 11 ? calibration................................................................................... 12 ? operational control................................................................... 12 ? input/output functions ............................................................ 14 ? diagnostics.................................................................................. 15 ? product identification................................................................ 16 ? applications information .............................................................. 17 ? installation/handling................................................................. 17 ? gyroscope bias optimization................................................... 17 ? input adc channel................................................................... 17 ? interface printed circuit board (pcb).................................... 17 ? outline dimensions ....................................................................... 18 ? ordering guide .......................................................................... 18 ? revision history 2/11rev. 0 to rev. a changes to gyroscopes misalignment and accelerometers misalignment test conditions/comments, table 1 .................... 3 changes to table 30 and table 31 ................................................ 16 1/10revision 0: initial version
adis16367 rev. a | page 3 of 20 specifications t a = 25c, vcc = 5.0 v, angular rate = 0/sec, dynamic range = 300/sec 1 g , unless otherwise noted. table 1. parameter test conditions/comments min typ max unit gyroscopes dynamic range 1200 1400 /sec initial sensitivity dynamic range = 1200/sec 0.198 0.2 0.202 /sec/lsb dynamic range = 600/sec 0.1 /sec/lsb dynamic range = 300/sec 0.05 /sec/lsb sensitivity temperature coefficient ?40c t a +85c 40 ppm/c misalignment axis-to-axis 0.05 degrees axis-to-frame (package) 0.5 degrees nonlinearity best-fit straight line 0.1 % of fs initial bias error 1 3 /sec in-run bias stability 1 , smpl_prd = 0x0001 0.013 /sec angular random walk 1 , smpl_prd = 0x0001 2.0 /hr bias temperature coefficient ?40c t a +85c 0.01 /sec/c linear acceleration effect on bias any axis, 1 (msc_ctrl[7] = 1) 0.075 /sec/ g bias voltage sensitivity vcc = 4.75 v to 5.25 v 0.3 /sec/v output noise 1200/sec range, no filtering 0.8 /sec rms rate noise density f = 25 hz, 1200/sec range, no filtering 0.044 /sec/hz rms 3 db bandwidth 330 hz sensor resonant frequency 14.5 khz self-test change in output response 1200/sec range setting 170 350 625 lsb accelerometers each axis dynamic range 18 g initial sensitivity 3.285 3.33 3.38 m g /lsb sensitivity temperature coefficient ?40c t a +85c 50 ppm/c misalignment axis-to-axis 0.2 degrees axis-to-frame (package) 0.5 degrees nonlinearity best-fit straight line 0.1 % of fs initial bias error 1 50 m g in-run bias stability 1 0.2 m g velocity random walk 1 0.2 m/sec/hr bias temperature coefficient ?40c t a +85c 0.3 m g /c bias voltage sensitivity vcc = 4.75 v to 5.25 v 2.5 m g /v output noise no filtering 9 m g rms noise density no filtering 0.5 m g /hz rms 3 db bandwidth 330 hz sensor resonant frequency 5.5 khz self-test change in output response x-axis and y-axis 59 151 lsb temperature sensor scale factor output = 0x0000 at 25c (5c) 0.136 c/lsb adc input resolution 12 bits integral nonlinearity 2 lsb differential nonlinearity 1 lsb offset error 4 lsb gain error 2 lsb input range 0 3.3 v input capacitance during acquisition 20 pf
adis16367 rev. a | page 4 of 20 parameter test conditions/comments min typ max unit dac output 5 k/100 pf to gnd resolution 12 bits relative accuracy 101 lsb input code 4095 lsb 4 lsb differential nonlinearity 1 lsb offset error 5 mv gain error 0.5 % output range 0 3.3 v output impedance 2 output settling time 10 s logic inputs 1 input high voltage, v ih 2.0 v input low voltage, v il 0.8 v cs signal to wake up from sleep mode 0.55 v cs wake-up pulse width 20 s logic 1 input current, i ih v ih = 3.3 v 0.2 10 a logic 0 input current, i il v il = 0 v all pins except rst 40 60 a rst pin 1 ma input capacitance, c in 10 pf digital outputs 1 output high voltage, v oh i source = 1.6 ma 2.4 v output low voltage, v ol i sink = 1.6 ma 0.4 v flash memory endurance 2 10,000 cycles data retention 3 t j = 85c 20 years functional times 4 time until data is available power-on, start-up time normal mode, smpl_prd 0x09 180 ms low power mode, smpl_prd 0x0a 250 ms reset recovery time normal mode, smpl_prd 0x09 60 ms low power mode, smpl_prd 0x0a 130 ms sleep mode recovery time normal mode, smpl_prd 0x09 4 ms low power mode, smpl_prd 0x0a 9 ms flash memory test time normal mode, smpl_prd 0x09 17 ms low power mode, smpl_prd 0x0a 90 ms automatic self-test time smpl_prd = 0x0001 12 ms conversion rate smpl_prd = 0x0001 to 0x00ff 0.413 819.2 sps clock accuracy 3 % sync input clock 5 0.8 1.2 khz power supply operating voltage range, vcc 4.75 5.0 5.25 v power supply current low power mode 24 ma normal mode 49 ma sleep mode 500 a 1 the digital i/o signals are driven by an internal 3.3 v supply, and the inputs are 5 v tolerant. 2 endurance is qualified as per jedec standard 22, method a117, and measured at ?40c, +25c, +85c, and +125c. 3 the data retention lifetime equivalent is at a junction temperature (t j ) of 85c as per jedec st andard 22, method a117. data retention lifetime decreases with junction temperature. 4 these times do not includ e thermal settling and inte rnal filter response t imes (330 hz bandwidth), wh ich may affect overall ac curacy. 5 the sync input clock functions below the specified minimum value, at reduced performance levels.
adis16367 rev. a | page 5 of 20 timing specifications t a = 25c, vcc = 5 v, unless otherwise noted. table 2. normal mode (smpl_prd 0x09) low power mode (smpl_prd 0x0a) burst read parameter description min 1 typ max min 1 typ max min 1 typ max unit f sclk serial clock 0.01 2.0 0.01 0.3 0.01 1.0 mhz t stall stall period between data 9 75 1/f sclk s t readrate read rate 40 100 s t cs chip select to clock edge 48.8 48.8 48.8 ns t dav dout valid after sclk edge 100 100 100 ns t dsu din setup time before sclk rising edge 24.4 24.4 24.4 ns t dhd din hold time after sclk rising edge 48.8 48.8 48.8 ns t sclkr , t sclkf sclk rise/fall times 5 12.5 5 12.5 5 12.5 ns t dr , t df dout rise/fall times 5 12.5 5 12.5 5 12.5 ns t sfs cs high after sclk edge 5 5 5 ns t 1 input sync positive pulse width 5 5 s t x input sync low time 100 100 s t 2 input sync to data-ready output 600 600 s t 3 input sync period 833 833 s 1 guaranteed by design and characterization, but not tested in production. timing diagrams cs sclk dout din 1 2 3 4 5 6 15 16 r/w a5 a6 a4 a3 a2 d2 msb db14 d1 lsb db13 db12 db10 db11 db2 lsb db1 t cs t sfs t dav t dhd t dsu 08398-002 figure 2. spi timing and sequence cs sclk t readrate t stall 08398-003 figure 3. stall time and data rate t 3 t x t 2 t 1 sync clock (dio4) data ready 08398-004 figure 4. input clock timing diagram
adis16367 rev. a | page 6 of 20 absolute maximum ratings table 3. parameter rating acceleration any axis, unpowered 2000 g any axis, powered 2000 g vcc to gnd ?0.3 v to +6.0 v digital input voltage to gnd ?0.3 v to +5.3 v digital output voltage to gnd ?0.3 v to vcc + 0.3 v analog input to gnd ?0.3 v to +3.6 v operating temperature range ?40c to +105c storage temperature range ?65c to +125c 1 , 2 1 extended exposure to temperatures outside the specified temperature range of ?40c to +105c can adversely affect the accuracy of the factory calibration. for best accuracy, store the parts within the specified operating range of ?40 c to +105c. 2 although the device is capable of withstanding short-term exposure to 150c, long-term exposure threatens internal mechanical integrity. stresses above those listed under absolute maximum ratings may cause permanent damage to the device. this is a stress rating only; functional operation of the device at these or any other conditions above those indicated in the operational section of this specification is not implied. exposure to absolute maximum rating conditions for extended periods may affect device reliability. table 4. package characteristics package type ja jc device weight 24-lead module (ml-24-2) 39.8c/w 14.2c/w 16 grams esd caution
adis16367 rev. a | page 7 of 20 pin configuration and fu nction descriptions notes 1. this representation displays the top view pinout for the mating socket connector. 2. the actual connector pins are not visible from the top view. 3. mating connector: samtec clm-112-02 or equivalent. 4. dnc = do not connect. 1 dio3 sclk din dio1 dio2 vcc gnd gnd dnc dnc aux_adc dnc dio4/clkin dout cs rst vcc vcc gnd dnc dnc aux_dac dnc dnc 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 adis16367 top view (not to scale) 08398-005 figure 5. pin configuration 08398-006 a y g y g x pin 1 pin 23 y-axis x-axis z-axis a x a z g z origin alignment reference point see msc_ctrl[6]. notes 1. acceleration ( a x , a y , a z ) and rotational ( g x , g y , g z ) arrows indicate the direction of motion that produces a positive output. figure 6. axial orientation table 5. pin function descriptions pin no. mnemonic type 1 description 1 dio3 i/o configurable digital input/output. 2 dio4/clkin i/o configurable digital input/output or sync clock input. 3 sclk i spi serial clock. 4 dout o spi data output. clocks output on sclk falling edge. 5 din i spi data input. clocks input on sclk rising edge. 6 cs i spi chip select. 7, 9 dio1, dio2 i/o configurable digital input/output. 8 rst i reset. 10, 11, 12 vcc s power supply. 13, 14, 15 gnd s power ground. 16, 17, 18, 19, 22, 23, 24 dnc n/a do not connect. 20 aux_dac o auxiliary, 12-bit dac output. 21 aux_adc i auxiliary, 12-bit adc input. 1 i/o is input/output, i is input, o is outp ut, s is supply, and n/a is not applicable.
adis16367 rev. a | page 8 of 20 typical performance characteristics 0.001 0.01 0.1 0.1 1 10 100 1k 10k tau (seconds) root a llan variance (/sec) ?1 mean +1 08398-007 figure 7. gyroscope allan variance 0.0001 0.001 0.01 0.1 1 10 100 1k 10k tau (seconds) ?1 mean +1 08398-008 root allan variance ( g ) figure 8. accelerometer allan variance
adis16367 rev. a | page 9 of 20 theory of operation basic operation the adis16367 is an autonomous sensor system that starts up after it has a valid power supply voltage and begins producing inertial measurement data at the factory default sample rate setting of 819.2 sps. after each sample cycle, the sensor data is loaded into the output registers, and dio1 pulses high, which provides a new data-ready control signal for driving system- level interrupt service routines. in a typical system, a master processor accesses the output data registers through the spi interface, using the connection diagram shown in figure 9 . table 6 provides a generic functional description for each pin on the master processor. table 7 describes the typical master processor settings that are normally found in a configuration register and used for communicating with the adis16367. system processor spi master adis16367 spi slave sclk cs din dout sclk ss mosi miso 5v irq dio1 vdd i/o lines are compatible with 3.3v or 5v logic levels 10 6 3 5 4 7 11 12 13 14 15 08398-009 figure 9. electrical connection diagram table 6. generic master processor pin names and functions pin name function ss slave select sclk serial clock mosi master output, slave input miso master input, slave output irq interrupt request table 7. generic master processor spi settings processor setting description master the adis16367 operates as a slave sclk rate 2 mhz 1 normal mode, smpl_prd[7:0] 0x09 spi mode 3 cpol = 1 (polarity), cpha = 1 (phase) msb first mode bit sequence 16-bit mode shift register/data length 1 for burst read, sclk rate 1 mhz. for low power mode, sclk rate 300 khz. the user registers provide addressing for all input/output operations on the spi interface. each 16-bit register has two 7-bit addresses: one for its upper byte and one for its lower byte. table 8 lists the lower byte address for each register, and figure 10 shows the generic bit assignments. upper byte 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 lower byte 08398-010 figure 10. generic register bit assignments reading sensor data although the adis16367 produces data independently, it operates as a spi slave device that communicates with system (master) processors using the 16-bit segments displayed in figure 11 . individual register reads require two of these 16-bit sequences. the first 16-bit sequence contains the read command bit ( r /w = 0) and the target register address (a6 to a0); the last eight bits are dont care bits when requesting a read. the second 16-bit sequence transmits the register contents (d15 to d0) on the dout line. for example, if din = 0x0a00, the contents of xaccl_out are shifted out on the dout line during the next 16-bit sequence. the spi operates in full-duplex mode, which means that the master processor can read the output data from dout while using the same sclk pulses to transmit the next target address on din. device configuration the user register memory map (see table 8 ) identifies configuration registers with either a w or r/w. configuration commands also use the bit sequence shown in figure 11 . if the msb = 1, the last eight bits (dc7 to dc0) in the din sequence are loaded into the memory address associated with the address bits (a6 to a0). for example, if din = 0xa11f, 0x1f is loaded into address 0x21 (xaccl_off, upper byte) at the conclusion of the data frame. the master processor initiates the backup function by setting glob_cmd[3] = 1 (din = 0xbe04). this command copies the user registers into their assigned flash memory locations and requires the power supply to stay within its normal operating range for the entire 50 ms process. the flash_cnt register provides a running count of these events for monitoring the long-term reliability of the flash memory. r/w r/w a6 a5 a4 a3 a2 a1 a0 dc7 dc6 dc5 dc4 dc3 dc2 dc1 dc0 d0d1d2d3 d4 d5d6d7d8 d9d10 d11d12d13 d14 d15 notes 1. the dout bit pattern reflects the entire contents of the register identified by [a6:a0] and [r/w = 0] in the previous sequence. 2. if r/w = 1 during the previous sequence, dout is not defined. cs sclk din dout a6 a5 d13 d14 d15 08398-011 figure 11. spi communication bit sequence
adis16367 rev. a | page 10 of 20 memory map table 8. user register memory map name user access flash backup address 1 default register description bit function flash_cnt read only yes 0x00 n/a flash memory write count n/a supply_out read only no 0x02 n/a power supply measurement see table 9 xgyro_out read only no 0x04 n/a x-axis gyroscope output see table 9 ygyro_out read only no 0x06 n/a y-axis gyroscope output see table 9 zgyro_out read only no 0x08 n/a z-axis gyroscope output see table 9 xaccl_out read only no 0x0a n/a x-axis accelerometer output see table 9 yaccl_out read only no 0x0c n/ a y-axis accelerometer output see table 9 zaccl_out read only no 0x0e n/ a z-axis accelerometer output see table 9 xtemp_out read only no 0x10 n/a x-ax is gyroscope temperature output see table 9 ytemp_out read only no 0x12 n/a y-ax is gyroscope temperature output see table 9 ztemp_out read only no 0x14 n/a z-ax is gyroscope temperature output see table 9 aux_adc read only no 0x16 n/a auxiliary adc output see table 9 reserved n/a n/a 0x18 n/a reserved n/a xgyro_off read/write yes 0x1a 0x0000 x-ax is gyroscope bias offset factor see table 15 ygyro_off read/write yes 0x1c 0x0000 y-axis gyroscope bias offset factor see table 15 zgyro_off read/write yes 0x1e 0x0000 z-axis gyroscope bias offset factor see table 15 xaccl_off read/write yes 0x20 0x0000 x-axis acceleration bias offset factor see table 16 yaccl_off read/write yes 0x22 0x0000 y-axis acceleration bias offset factor see table 16 zaccl_off read/write yes 0x24 0x0000 z-axis acceleration bias offset factor see table 16 alm_mag1 read/write yes 0x26 0x0000 alarm 1 amplitude threshold see table 27 alm_mag2 read/write yes 0x28 0x0000 alarm 2 amplitude threshold see table 27 alm_smpl1 read/write yes 0x2a 0x0000 alarm 1 sample size see table 28 alm_smpl2 read/write yes 0x2c 0x0000 alarm 2 sample size see table 28 alm_ctrl read/write yes 0x2e 0x0000 alarm control see table 29 aux_dac read/write no 0x30 0x0000 auxiliary dac data see table 23 gpio_ctrl read/write no 0x32 0x0000 auxili ary digital input/output control see table 21 msc_ctrl read/write yes 0x34 0x0006 data-r eady, self-test, miscellaneous see table 22 smpl_prd read/write yes 0x36 0x0001 internal sample period (rate) control see table 18 sens_avg read/write yes 0x38 0x0402 dynamic range and digital filter control see table 20 slp_cnt write only no 0x3a 0x0000 sleep mode control see table 19 diag_stat read only no 0x3c 0x0000 system status see table 26 glob_cmd write only n/a 0x3e 0x0000 system command see table 17 reserved n/a n/a 0x40 to 0x51 n/a reserved n/a lot_id1 read only yes 0x52 n/a lot identification code 1 see table 32 lot_id2 read only yes 0x54 n/a lot identification code 2 see table 32 prod_id read only yes 0x56 0x3fef product identification see table 32 serial_num read only yes 0x58 n/a serial number see table 32 1 each register contains two bytes. the address of the lower byte is displayed. the address of the upper byte is equal to the ad dress of the lower byte plus 1.
adis16367 rev. a | page 11 of 20 burst read data collection burst read data collection is a process-efficient method for collecting data from the adis16367. in the burst read, all output registers are clocked out on dout, 16 bits at a time, in sequential data cycles (each separated by one sclk period). to start a burst read sequence, set din = 0x3e00. the contents of each output register are then shifted out on dout, starting with supply_out and ending with aux_adc (see figure 13 ) according to their address (see table 8 ). output data registers each output data register uses the format in figure 12 and tabl e 9 . figure 6 shows the positive direction for each inertial sensor. the nd bit is equal to 1 when the register contains unread data. the ea bit is high when any error/alarm flag in the diag_stat register is equal to 1. msb for 14-bit output msb for 12-bit output nd ea 0 8398-013 figure 12. output data register bit assignments table 9. output data register formats register bits scale reference supply_out 12 2.418 mv see table 10 xgyro_out 1 14 0.2/sec see table 11 ygyro_out 1 14 0.2/sec see table 11 zgyro_out 1 14 0.2/sec see table 11 xaccl_out 14 3.333 m g see table 12 yaccl_out 14 3.333 m g see table 12 zaccl_out 14 3.333 m g see table 12 xtemp_out 2 12 0.136c see table 13 ytemp_out 2 12 0.136c see table 13 ztemp_out 2 12 0.136c see table 13 aux_adc 12 805.8 v see table 14 1 assumes that the scaling is set to 1200/s ec. this factor scales with the range. 2 0x0000 = 25c (5c). table 10. power supply, offset binary format supply voltage decimal hex binary 5.25 v 2171 lsb 0x87b xxxx 1000 0111 1011 5.002418 v 2069 lsb 0x815 xxxx 1000 0001 0101 5 v 2068 lsb 0x814 xxxx 1000 0001 0100 4.997582 v 2067 lsb 0x813 xxxx 1000 0001 0011 4.75 v 1964 lsb 0x7ac xxxx 0111 1010 1100 table 11. rotation rate, twos complement format rotation rate decimal hex binary +1200/sec +6000 lsb 0x1770 xx01 0111 0111 0000 +0.4/sec +2 lsb 0x0002 xx00 0000 0000 0010 +0.2/sec +1 lsb 0x0001 xx00 0000 0000 0001 0/sec 0 lsb 0x0000 xx00 0000 0000 0000 ?0.2/sec ?1 lsb 0x3fff xx11 1111 1111 1111 ?0.4/sec ?2 lsb 0x3ffe xx11 1111 1111 1110 ?1200/sec ?6000 lsb 0x2890 xx10 1000 1001 0000 table 12. acceleration, twos complement format acceleration decimal hex binary +18 g +5401 lsb 0x1519 xx01 0101 0001 1001 +6.667 m g +2 lsb 0x0002 xx00 0000 0000 0010 +3.333 m g +1 lsb 0x0001 xx00 0000 0000 0001 0 g 0 lsb 0x0000 xx00 0000 0000 0000 ?3.333 m g ?1 lsb 0x3fff xx11 1111 1111 1111 ?6.667 m g ?2 lsb 0x3ffe xx11 1111 1111 1110 ?18 g ?5401 lsb 0x2ae7 xx10 1010 1110 0111 table 13. temperature, twos complement format temperature decimal hex binary +105c +588 lsb 0x24c xxxx 0010 0100 1100 +85c +441 lsb 0x1b9 xxxx 0001 1011 1001 +25.272c +2 lsb 0x002 xxxx 0000 0000 0010 +25.136c +1 lsb 0x001 xxxx 0000 0000 0001 +25c 0 lsb 0x000 xxxx 0000 0000 0000 +24.864c ?1 lsb 0xfff xxxx 1111 1111 1111 +24.728c ?2 lsb 0xffe xxxx 1111 1111 1110 ?40c ?478 lsb 0xe22 xxxx 1110 0010 0010 table 14. analog input, offset binary format input voltage decimal hex binary 3.3 v 4095 lsb 0xfff xxxx 1111 1111 1111 1 v 1241 lsb 0x4d9 xxxx 0100 1101 1001 1.6116 mv 2 lsb 0x002 xxxx 0000 0000 0010 805.8 v 1 lsb 0x001 xxxx 0000 0000 0001 0 v 0 lsb 0x000 xxxx 0000 0000 0000 0x3e00 previous don?t care supply_out xgyro_out aux_adc 123 12 ygyro_out zgyro_out 45 cs sclk din dout notes 1. the dout line has been simplified for space constraints but, ideally, should include all registers from supply_out through aux_adc. 08398-012 figure 13. burst read sequence
adis16367 rev. a | page 12 of 20 calibration manual bias calibration the bias offset registers in table 15 and table 16 provide a manual adjustment function for the output of each sensor. for example, if xgyro_off = 0x1ff6 (din = 0x9b1f, 0x9af6), the xgyro_out offset shifts by ?10 lsbs, or ?0.5/sec. table 15. xgyro_off, ygyro_off, zgyro_off bit descriptions bit description (default = 0x0000) [15:13] not used. [12:0] data bits. twos complement, 0.05/sec per lsb. typical adjustment range = 200/sec. table 16. xaccl_off, yaccl_off, zaccl_off bit descriptions bit description (default = 0x0000) [15:12] not used. [11:0] data bits. twos complement, 3.333 m g /lsb. typical adjustment range = 6.75 g. gyroscope automatic bias null calibration set glob_cmd[0] = 1 (din = 0xbe01) to execute the automatic bias null calibration function. this function measures all three gyroscope output registers and then loads each gyroscope offset register with the opposite value to provide a quick bias calibration. all sensor data is then reset to 0, and the flash memory is updated automatically within 50 ms (see table 1 7 ). gyroscope precision automa tic bias null calibration set glob_cmd[4] = 1 (din = 0xbe10) to execute the precision automatic bias null calibration function. this function takes the sensor offline for 30 sec while it collects a set of data and calculates more accurate bias correction factors for each gyroscope. after this function is executed, the newly calculated correction factor is loaded into the gyroscope offset registers, all sensor data is reset to 0, and the flash memory is updated automatically within 50 ms (see table 17 ). restoring factory calibration set glob_cmd[1] = 1 (din = 0xbe02) to execute the factory calibration restore function. this function resets each user calibration register to 0x0000 (see table 15 and table 16 ), resets all sensor data to 0, and automatically updates the flash memory within 50 ms (see table 17 ). linear acceleration bias compensation (gyroscope) set msc_ctrl[7] = 1 (din = 0xb486) to enable correction for low frequency acceleration influences on gyroscope bias. the din sequence also preserves the factory default condition for the data-ready function (see table 22 ). operational control global commands the glob_cmd register provides trigger bits for several useful functions. setting the assigned bit to 1 starts each operation, which returns the bit to 0 after completion. for example, set glob_cmd[7] = 1 (din = 0xbe80) to execute a software reset, which stops the sensor operation and runs the device through its start-up sequence. this sequence includes loading the control registers with the data in their respective flash memory locations prior to producing new data. reading the glob_cmd register (din = 0x3e00) starts the burst read sequence. table 17. glob_cmd bit descriptions bits description [15:8] not used [7] software reset command [6:5] not used [4] precision autonull command [3] flash update command (see the device configuration section) [2] auxiliary dac data latch (see table 24 ) [1] factory calibration restore command [0] autonull command
adis16367 rev. a | page 13 of 20 internal sample rate the smpl_prd register provides discrete sample rate settings using the bit assignments in table 18 and the following equation: t s = t b ( n s + 1) for example, when smpl_prd[7:0] = 0x0a, the sample rate is 149 sps. table 18. smpl_prd bit descriptions bits description (default = 0x0001) [15:8] not used [7] time base (t b ) 0 = 0.61035 ms, 1 = 18.921 ms [6:0] increment setting (n s ) internal sample period = t s = t b (n s + 1) the default sample rate setting of 819.2 sps preserves the sensor bandwidth and provides optimal performance. for systems that value slower sample rates, keep the internal sample rate at 819.2 sps. use the programmable filter (sens_avg) to reduce the bandwidth, which helps to prevent aliasing. the data-ready function (msc_ctrl) can drive an interrupt routine that uses a counter to help ensure data coherence at the reduced rates. power management setting smpl_prd 0x0a also sets the sensor to low power mode. for systems that require lower power dissipation, in- system characterization helps users to quantify the associated performance trade-offs. in addition to sensor performance, this mode affects spi data rates (see table 2 ). set slp_cnt[8] = 1 (din = 0xbb01) to start the indefinite sleep mode, which requires a cs assertion (high to low), reset, or power cycle to wake up. use slp_cnt[7:0] to put the device into sleep mode for a specified period. for example, slp_cnt[7:0] = 0x64 (din = 0xba64) puts the adis16367 to sleep for 50 sec. table 19. slp_cnt bit descriptions bits description [15:9] not used [8] indefinite sleep mode; set to 1 [7:0] programmable sleep time bits, 0.5 sec/lsb sensor bandwidth the signal chain for each mems sensor has several filter stages, which shape their frequency response. figure 14 provides a block diagram for both gyroscope and accelerometer signal paths. table 20 provides additional information for digital filter configuration. lpf lpf n n 404hz from gyroscope sensor 757hz lpf n n from acceleration sensor 330hz n = 2 m m = sens_avg[2:0] 08398-022 figure 14. mems analog and digital filters digital filtering the n blocks in figure 14 are part of the programmable low-pass filter, which provides additional noise reduction on the inertial sensor outputs. this filter contains two cascaded averaging filters that provide a bartlett window, fir filter response (see figure 15 ). for example, set sens_avg[2:0] = 100 (din = 0xb804) to set each stage to 16 taps. when used with the default sample rate of 819.2 sps, this value reduces the sensor bandwidth to approximately 16 hz. 0 ?20 ?40 ?60 ?80 ?100 ?120 ?140 0.001 0.01 0.1 1 magnitude (db) frequency (ratio) n = 2 n = 4 n = 16 n = 64 08398-015 figure 15. bartlett window, fi r filter frequency response (phase delay = n samples) dynamic range the sens_avg[10:8] bits provide three dynamic range settings for this gyroscope. the lower dynamic range settings (300/sec and 600/sec) limit the minimum filter tap sizes to maintain resolution. for example, set sens_avg[10:8] = 010 (din = 0xb902) for a measurement range of 600/sec. because this setting can influence the filter settings, program sens_avg[10:8] and then sens_avg[2:0] if more filtering is required. table 20. sens_avg bit descriptions bits description (default = 0x0402) [15:11] not used [10:8] measurement range (sensitivity) selection 100 = 1200/sec (default condition) 010 = 600/sec, filter taps 4 (bits[2:0] 0x02) 001 = 300/sec, filter taps 16 (bits[2:0] 0x04) [7:3] not used [2:0] number of taps in each stage; value of m in n = 2 m
adis16367 rev. a | page 14 of 20 input/output functions general-purpose i/o dio1, dio2, dio3, and dio4 are configurable, general-purpose i/o lines that serve multiple purposes according to the following control register priority: msc_ctrl, alm_ctrl, and gpio_ctrl. for example, set gpio_ctrl = 0x080c (din = 0xb308, and then 0xb20c) to configure dio1 and dio2 as inputs and dio3 and dio4 as outputs, with dio3 set low and dio4 set high. in this configuration, read gpio_ctrl (din = 0x3200). the digital state of dio1 and dio2 is in gpio_ctrl[9:8]. table 21. gpio_ctrl bit descriptions bits description (default = 0x0000) [15:12] not used [11] general-purpose i/o line 4 (dio4) data level [10] general-purpose i/o line 3 (dio3) data level [9] general-purpose i/o line 2 (dio2) data level [8] general-purpose i/o line 1 (dio1) data level [7:4] not used [3] general-purpose i/o line 4 (dio4) direction control (1 = output, 0 = input) [2] general-purpose i/o line 3 (dio3) direction control (1 = output, 0 = input) [1] general-purpose i/o line 2 (dio2) direction control (1 = output, 0 = input) [0] general-purpose i/o line 1 (dio1) direction control (1 = output, 0 = input) input clock configuration the input clock function allows for external control sampling in the adis16367. set gpio_ctrl[3] = 0 (din = 0xb200) and smpl_prd[7:0] = 0x00 (din = 0xb600) to enable this function. see table 2 and figure 4 for timing information. data ready i/o indicator the factory default sets dio1 as a positive data-ready indicator signal. the msc_ctrl[2:0] bits provide configuration options for changing the default. for example, set msc_ctrl[2:0] = 100 (din = 0xb404) to change the polarity of the data ready signal on dio1 for interrupt inputs that require negative logic inputs for activation. the pulse width is between 100 s and 200 s over all conditions. table 22. msc_ctrl bit descriptions bits description (default = 0x0006) [15:12] not used [11] memory test (cleared upon completion) (1 = enabled, 0 = disabled) [10] internal self-test enable (cleared upon completion) (1 = enabled, 0 = disabled) [9] manual self-test, negative stimulus (1 = enabled, 0 = disabled) [8] manual self-test, positive stimulus (1 = enabled, 0 = disabled) [7] linear acceleration bias compensation for gyroscopes (1 = enabled, 0 = disabled) [6] linear accelerometer origin alignment (1 = enabled, 0 = disabled) [5:3] not used [2] data-ready enable (1 = enabled, 0 = disabled) [1] data-ready polarity (1 = active high, 0 = active low) [0] data-ready line select (1 = dio2, 0 = dio1) auxiliary dac the 12-bit aux_dac line can drive its output to within 5 mv of the ground reference when it is not sinking current. as the output approaches 0 v, the linearity begins to degrade (~100 lsb starting point). as the sink current increases, the nonlinear range increases. the dac latch command moves the values of the aux_dac register into the dac input register, enabling both bytes to take effect at the same time. table 23. aux_dac bit descriptions bits description (default = 0x0000) [15:12] not used [11:0] data bits, scale factor = 0.8059 mv/lsb offset binary format, 0 v = 0 lsb table 24. setting aux_dac = 1 v din description 0xb0d9 aux_dac[7:0] = 0xd9 (217 lsb) 0xb104 aux_dac[15:8] = 0x04 (1024 lsb) 0xbe04 glob_cmd[2] = 1; move values into the dac input register, resulting in a 1 v output level
adis16367 rev. a | page 15 of 20 diagnostics self-test the self-test function allows the user to verify the mechanical integrity of each mems sensor. it applies an electrostatic force to each sensor element, which results in mechanical displacement that simulates a response to actual motion. table 1 lists the expected response for each sensor, which provides pass/fail criteria. set msc_ctrl[10] = 1 (din = 0xb504) to run the internal self-test routine, which exercises all inertial sensors, measures each response, makes pass/fail decisions, and reports them to error flags in the diag_stat register. msc_ctrl[10] resets itself to 0 after completing the routine. the msc_ctrl[9:8] bits provide manual control over the self-test function for investigation of potential failures. table 25 outlines an example test flow for using this option to verify the x-axis gyroscope function. table 25. manual self-test example sequence din description 0xb601 smpl_prd[7:0] = 0x01, sample rate = 819.2 sps 0xb904 sens_avg[15:8] = 0x04, gyro range = 1200/sec 0xb802 sens_avg[7:0] = 0x02, four-tap averaging filter delay = 50 ms 0x0400 read xgyro_out 0xb502 msc_ctrl[9] = 1, gyroscope negative self-test delay = 50 ms 0x0400 read xgyro_out determine whether the bias in the gyroscope output change according to the self-test response specified in table 1 0xb501 msc_ctrl[9:8] = 01, gyroscope/accelerometer positive self-test delay = 50 ms 0x0400 read xgyro_out determine whether the bias in the gyroscope output changed according to the self-test response specified in table 1 0xb500 msc_ctrl[15:8] = 0x00 zero motion provides results that are more reliable. the settings in table 25 are flexible and allow for optimization around speed and noise influence. for example, using fewer filtering taps decreases delay times but increases the possibility of noise influence. memory test setting msc_ctrl[11] = 1 (din = 0xb508) performs a checksum verification of the flash memory locations. the pass/fail result is loaded into diag_stat[6]. status the error flags provide indicator functions for common system level issues. all of the flags are cleared (set to 0) after each diag_stat register read cycle. if an error condition remains, the error flag returns to 1 during the next sample cycle. the diag_stat[1:0] bits do not require a read of this register to return to 0. if the power supply voltage goes back into range, these two flags are cleared automatically. table 26. diag_stat bit descriptions bit description (default = 0x0000) [15] z-axis accelerometer self-t est failure (1 = fail, 0 = pass) [14] y-axis accelerometer self-test failure (1 = fail, 0 = pass) [13] x-axis accelerometer self-test failure (1 = fail, 0 = pass) [12] z-axis gyroscope self-test failure (1 = fail, 0 = pass) [11] y-axis gyroscope self-test failure (1 = fail, 0 = pass) [10] x-axis gyroscope self-test failure (1 = fail, 0 = pass) [9] alarm 2 status (1 = active, 0 = inactive) [8] alarm 1 status (1 = active, 0 = inactive) [7] not used [6] flash test, checksum flag (1 = fail, 0 = pass) [5] self-test diagnostic error flag (1 = fail, 0 = pass) [4] sensor overrange (1 = fail, 0 = pass) [3] spi communication failure (1 = fail, 0 = pass) [2] flash update failure (1 = fail, 0 = pass) [1] power supply > 5.25 v (1 = power supply > 5.25 v, 0 = power supply 5.25 v) [0] power supply < 4.75 v (1 = power supply < 4.75 v, 0 = power supply 4.75 v)
adis16367 rev. a | page 16 of 20 alarm registers the alarm function provides monitoring for two independent conditions. the alm_ctrl register provides control inputs for data source, data filtering (prior to comparison), static comparison, dynamic rate-of-change comparison, and output indicator configurations. the alm_magx registers establish the trigger threshold and polarity configurations. table 30 gives an example of how to configure a static alarm. the alm_smplx registers provide the numbers of samples to use in the dynamic rate-of-change configuration. the period equals the number in the alm_smplx register multiplied by the sample period time, which is established by the smpl_prd register. see table 31 for an example of how to configure the sensor for this type of function. table 27. alm_mag1, alm_mag2 bit descriptions bits description (default = 0x0000) [15] comparison polarity (1 = greater than, 0 = less than) [14] not used [13:0] data bits that match the format of the trigger source selection table 28. alm_smpl1, alm_smpl2 bit descriptions bits description (default = 0x0000) [15:8] not used [7:0] data bits: number of sa mples (both 0x00 and 0x01 = 1) table 29. alm_ctrl bit descriptions bits description (default = 0x0000) [15:12] alarm 2 source selection 0000 = disable 0001 = power supply output 0010 = x-axis gyroscope output 0011 = y-axis gyroscope output 0100 = z-axis gyroscope output 0101 = x-axis accelerometer output 0110 = y-axis accelerometer output 0111 = z-axis accelerometer output 1000 = x-axis gyroscope temperature output 1001 = y-axis gyroscope temperature output 1010 = z-axis gyroscope temperature output 1011 = auxiliary adc input [11:8] alarm 1 source selection (same as alarm 2) [7] rate-of-change enable for alarm 2 (1 = rate of change, 0 = static level) [6] rate-of-change enable for alarm 1 (1 = rate of change, 0 = static level) [5] not used [4] comparison data filter setting (1 = filtered data, 0 = unfiltered data) [3] not used [2] alarm output enable (1 = enabled, 0 = disabled) [1] alarm output polarity (1 = active high, 0 = active low) [0] alarm output line select (1 = dio2, 0 = dio1) table 30. alarm configuration example 1 din description alm_ctrl = 0x5517 0xaf55, 0xae17 alarm 1 input = xaccl_out alarm 2 input = xaccl_out static level comparison, filtered data dio2 output indicator, positive polarity alm_mag1 = 0x8096 0xa700, 0xa696 alarm 1 is true if xaccl_out > +0.5 g alm_mag2 = 0x376a 0xa937, 0xa86a alarm 2 is true if xaccl_out < ?0.5 g table 31. alarm configuration example 2 din description alm_ctrl = 0x76c7 0xaf76, 0xaec7 alarm 1 input = yaccl_out alarm 2 input = zaccl_out rate-of-change comparison, unfiltered data dio2 output indicator, positive polarity 0xb601 smpl_prd = 0x0001 sample rate = 819.2 sps 0xaa08 alm_smpl1 = 0x0008 alarm 1 rate-of-change period = 9.77 ms 0xac50 alm_smpl2 = 0x0050 alarm 2 rate-of-change period = 97.7 ms alm_mag1 = 0x8096 0xa700, 0xa696 alarm 1 is true if yaccl_out increases by more than 0.5 g in 9.77 ms. alm_mag2 = 0x376a 0xa937, 0xa86a alarm 2 is true if zaccl_out decreases by more than 0.5 g in 97.7 ms. product identification table 32 provides a summary of the registers that identify the product: prod_id, which identifies the product type; lot_id1 and lot_id2, the 32-bit lot identification code; and serial_num, which displays the 12-bit serial number. all four registers are two bytes in length. when using the serial_num value to calculate the serial number, mask off the upper four bits and convert the remaining 12 bits to a decimal number. table 32. identification registers register name address description lot_id1 0x52 lot identification code 1 lot_id2 0x54 lot identification code 2 prod_id 0x56 product identification = 0x3fef (hexadecimal number for 16,367) serial_num 0x58 serial number
adis16367 rev. a | page 17 of 20 applications information installation/handling fo r adis16367 installation, use the following two-step process: 1. secure the baseplate using machine screws. 2. press the connector into its mate. fo r removal, 1. gently pry the connector from its mate using a small slot screwdriver. 2. remove the screws and lift the part up. never attempt to unplug the connector by pulling on the plastic case or baseplate. although the flexible connector is very reliable in normal operation, it can break when subjected to unreasonable handling. when broken, the flexible connector cannot be repaired. the an-1041 application note, i sensor? imu quick start guide and bias optimization tips , provides more information about developing an appropriate mechanical interface design. gyroscope bias optimization the factory calibration addresses initial bias errors along with temperature-dependent bias behaviors. installation and certain environmental conditions can introduce modest bias errors. the precision autonull command (glob_cmd[4]) provides a simple predeployment method for correcting these errors to an accuracy of approximately 0.013/sec, using an average of 30 sec. averaging the sensor output data for 100 sec can provide incremental performance gains, as well. controlling device rotation, power supply, and temperature during these averaging times helps to ensure optimal accuracy during this process. refer to the an-1041 application note for more information about optimizing performance. input adc channel the aux_adc register provides access to the auxiliary adc input channel. the adc is a 12-bit successive approximation converter that has an input circuit equivalent to the one shown in figure 16 . the maximum input is 3.3 v. the esd protection diodes can handle 10 ma without causing irreversible damage. the on resistance (r1) of the switch has a typical value of 100 . the sampling capacitor, c2, has a typical value of 16 pf. c2 c1 r1 v cc d d 08398-014 figure 16. equivalent analog input circuit (conversion phase: switch open, track phase: switch closed) interface printed circuit board (pcb) the adis16367/pcbz includes one adis16367blmz and one interface pcb. the interface pcb simplifies the process of integrating the ADIS16367BMLZ into an existing processor system. j1 and j2 are dual-row, 2 mm (pitch) connectors that work with a number of ribbon cable systems, including 3m part number 152212-0100-gb (ribbon crimp connector) and 3m part number 3625/12 (ribbon cable). figure 17 provides a hole pattern design for installing the ADIS16367BMLZ and the interface pcb onto the same surface. figure 18 provides the pin assignments for each connector. the pin descriptions match those listed in table 5 . the adis16367 does not require external capacitors for normal operation; therefore, the interface pcb does not use the c1/c2 pads (not shown in figure 17 ). 11 12 2 1 2 1 11 12 j2 j1 23.75 21.24 30.10 27.70 1.20 notes 1. dimensions in millimeters. 08398-020 figure 17. physical diagram for the adis16367/pcbz 1 2 3 4 5 6 7 8 9 10 11 12 aux_adc aux_dac dnc dnc dio2 dnc dnc dio1 dio4 dio3 gnd j2 gnd 2 4 6 8 10 1 3 5 7 9 11 12 rst cs gnd gnd vcc gnd vcc vcc din dout sclk j1 dnc 08398-021 figure 18. j1/j2 pin assignments
adis16367 rev. a | page 18 of 20 outline dimensions 122208-c top view bottom view front view detail a casting feature side view 22.964 22.710 22.456 14.950 14.550 14.150 21.410 21.210 21.010 23.504 23.250 22.996 5.20 5.00 4.80 (2 ) 4.20 4.00 3.80 (2 ) 17.41 17.21 17.01 (2 ) 2.660 2.500 2.340 23.454 23.200 22.946 31.900 31.700 31.500 4.330 bsc 1.588 bsc 2.382 bsc p i n 2 4 p i n 1 9.464 9.210 8.956 (2 ) detail a 14.00 bsc 0.305 bsc (24 ) 1.00 bsc (22 ) 1.65 bsc 4.162 bsc 7.18 bsc 1.588 bsc 12.10 bsc 0.05 bsc 1.00 bsc 2.00 bsc 10.50 bsc 10.60 bsc figure 19. 24-lead module with connector interface (ml-24-2) dimensions shown in millimeters ordering guide model 1 temperature range package description package option ADIS16367BMLZ ?40c to +105c 24-lead module with connector interface ml-24-2 adis16367/pcbz interface board 1 z = rohs compliant part.
adis16367 rev. a | page 19 of 20 notes
adis16367 rev. a | page 20 of 20 notes ?2010C2011 analog devices, inc. all rights reserved. trademarks and registered trademarks are the property of their respective owners. d08398-0-2/11(a)

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